ISO - 23.160 - Vacuum technology

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Standard and/or project	Stage	TC
ISO 1607-1:1980 Positive-displacement vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)	95.99	ISO/TC 112
ISO 1607-1:1993 Positive-displacement vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)	95.99	ISO/TC 112
ISO 1607-2:1978 Positive displacement vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of ultimate pressure	95.99	ISO/TC 112
ISO 1607-2:1989 Positive-displacement vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of ultimate pressure	95.99	ISO/TC 112
ISO 1608-1:1980 Vapour vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)	95.99	ISO/TC 112
ISO 1608-1:1993 Vapour vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)	90.20	ISO/TC 112
ISO 1608-2:1978 Vapour vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of critical backing pressure	95.99	ISO/TC 112
ISO 1608-2:1989 Vapour vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of critical backing pressure	90.20	ISO/TC 112
ISO 1609:1986 Vacuum technology — Flange dimensions	95.99	ISO/TC 112
ISO 1609:2020 Vacuum technology — Dimensions of non-knife edge flanges	60.60	ISO/TC 112
ISO 2861-1:1974 Vacuum technology — Quick-release couplings — Dimensions — Part 1: Clamped type	95.99	ISO/TC 112
ISO 2861-2:1980 Vacuum technology — Quick release couplings — Dimensions — Part 2: Screwed type	95.99	ISO/TC 112
ISO 2861:2013 Vacuum technology — Dimensions of clamped-type quick-release couplings	95.99	ISO/TC 112
ISO 2861:2020 Vacuum technology — Dimensions of clamped-type quick-release couplings	60.60	ISO/TC 112
ISO 3529-1:1981 Vacuum technology — Vocabulary — Part 1: General terms	95.99	ISO/TC 112
ISO 3529-1:2019 Vacuum technology — Vocabulary — Part 1: General terms	60.60	ISO/TC 112
ISO 3529-2:1981 Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms	95.99	ISO/TC 112
ISO 3529-2:2020 Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms	60.60	ISO/TC 112
ISO 3529-3:1981 Vacuum technology — Vocabulary — Part 3: Vacuum gauges	95.99	ISO/TC 112
ISO 3529-3:2014 Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges	90.93	ISO/TC 112
ISO 3530:1979 Vacuum technology — Mass-spectrometer-type leak-detector calibration	90.93	ISO/TC 135/SC 6
ISO 3567:2011 Vacuum gauges — Calibration by direct comparison with a reference gauge	90.20	ISO/TC 112
ISO/TS 3567:2005 Vacuum gauges — Calibration by direct comparison with a reference gauge	95.99	ISO/TC 112
ISO/TS 3669-2:2007 Vacuum technology — Bakable flanges — Part 2: Dimensions of knife-edge flanges	95.99	ISO/TC 112
ISO 3669:1986 Vacuum technology — Bakable flanges — Dimensions	95.99	ISO/TC 112
ISO 3669:2017 Vacuum technology — Bakeable flanges — Dimensions of knife-edge flanges	95.99	ISO/TC 112
ISO 3669:2020 Vacuum technology — Dimensions of knife-edge flanges	60.60	ISO/TC 112
ISO 3753:1977 Vacuum technology — Graphical symbols	95.99	ISO/TC 112
ISO 5302:2003 Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics	95.99	ISO/TC 112
ISO 9803-1:2007 Vacuum technology — Mounting dimensions of pipeline fittings — Part 1: Non knife-edge flange type	95.99	ISO/TC 112
ISO 9803-1:2020 Vacuum technology — Mounting dimensions of pipeline fittings — Part 1: Non knife-edge flange type	60.60	ISO/TC 112
ISO 9803-2:2007 Vacuum technology — Mounting dimensions of pipeline fittings — Part 2: Knife-edge flange type	95.99	ISO/TC 112
ISO 9803-2:2020 Vacuum technology — Mounting dimensions of pipeline fittings — Part 2: Knife-edge flange type	60.60	ISO/TC 112
ISO 9803:1993 Vacuum technology — Pipeline fittings — Mounting dimensions	95.99	ISO/TC 112
ISO 14291:2012 Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers	90.93	ISO/TC 112
ISO 19685:2017 Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges	60.60	ISO/TC 112
ISO 20146:2019 Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges	60.60	ISO/TC 112
ISO/TS 20175:2018 Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement	90.93	ISO/TC 112
ISO/TS 20177:2018 Vacuum technology — Vacuum gauges — Procedures to measure and report outgassing rates	90.93	ISO/TC 112
ISO 21358:2007 Vacuum technology — Right-angle valve — Dimensions and interfaces for pneumatic actuator	95.99	ISO/TC 112
ISO 21358:2020 Vacuum technology — Right-angle valve — Dimensions and interfaces for pneumatic actuator	60.60	ISO/TC 112
ISO 21360-1:2012 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description	95.99	ISO/TC 112
ISO 21360-1:2020 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description	60.60	ISO/TC 112
ISO 21360-2:2012 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps	95.99	ISO/TC 112
ISO 21360-2:2020 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps	60.60	ISO/TC 112
ISO 21360-3:2019 Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps	60.60	ISO/TC 112
ISO 21360-4:2018 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps	60.60	ISO/TC 112
ISO/CD 21360-5 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: NEG vacuum pumps	30.60	ISO/TC 112
ISO/CD 21360-6 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryo vacuum pumps	30.60	ISO/TC 112
ISO 21360:2007 Vacuum technology — Standard methods for measuring vacuum-pump performance — General description	95.99	ISO/TC 112
ISO/FDIS 24477 Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges	50.20	ISO/TC 112
ISO 27892:2010 Vacuum technology — Turbomolecular pumps — Measurement of rapid shutdown torque	90.93	ISO/TC 112
ISO 27893:2011 Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge	90.20	ISO/TC 112
ISO/TS 27893:2009 Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge	95.99	ISO/TC 112
ISO 27894:2009 Vacuum technology — Vacuum gauges — Specifications for hot cathode ionization gauges	90.93	ISO/TC 112
ISO 27895:2009 Vacuum technology — Valves — Leak test	90.93	ISO/TC 112

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